Reviews the theory, materials, and processes used in the lithographic process by which circuit elements are fabricated (it is these elements' decreasing size th

Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affectin

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these p

Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were

This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both