A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of

Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related t

The use of ion beams for materials analysis involves many different ion-atom interaction processes which previously have largely been considered in separate rev

In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB

Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issu