Modeling and Simulation of Optical Characteristics of Microelectromechanical Mirror Arrays

Download or read book Modeling and Simulation of Optical Characteristics of Microelectromechanical Mirror Arrays written by Peter C. Roberts and published by . This book was released on 1996-12-01 with total page 152 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS (Micro-Electro-Mechanical Systems) micromirror devices can be used to control the phase of a propagating light wavefront; and in particular to correct aberrations that may be present in the wavefront, due to either atmospheric turbulence or any other type of fixed or time and space varying aberrations. In order to shorten the design cycle of MEMS micromirror devices, computer software is developed to create, from MEMS micromirror device design data, a numerical model of the MEMS device. The model is then used to compute the far field diffraction pattern of a wavefront reflected from the device, and to predict the effectiveness with which it can be used to correct an aberrated wavefront. For validation, the computed far field diffraction pattern is compared to that measured using a real MEMS micromirror device, with a reasonable match between the two being found. The model is designed for maximum flexibility and can be easily adapted to new designs of MEMS micromirror devices.