Modeling of Hydrogen-based Plasmas in Microwave Plasma-assisted Chemical Vapor Deposition Reactors at Moderate Pressures
Author | : Collin Stephen Meierbachtol |
Publisher | : |
Total Pages | : 379 |
Release | : 2013 |
ISBN-10 | : 1303347512 |
ISBN-13 | : 9781303347511 |
Rating | : 4/5 (511 Downloads) |
Book Synopsis Modeling of Hydrogen-based Plasmas in Microwave Plasma-assisted Chemical Vapor Deposition Reactors at Moderate Pressures by : Collin Stephen Meierbachtol
Download or read book Modeling of Hydrogen-based Plasmas in Microwave Plasma-assisted Chemical Vapor Deposition Reactors at Moderate Pressures written by Collin Stephen Meierbachtol and published by . This book was released on 2013 with total page 379 pages. Available in PDF, EPUB and Kindle. Book excerpt: