Modelling and Experimental Study of Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Films
| Author | : Chue-san Yoo |
| Publisher | : |
| Total Pages | : 210 |
| Release | : 1988 |
| ISBN-10 | : OCLC:19689124 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis Modelling and Experimental Study of Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Films by : Chue-san Yoo
Download or read book Modelling and Experimental Study of Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Films written by Chue-san Yoo and published by . This book was released on 1988 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt:
