Nanofabrication Using Focused Ion and Electron Beams
| Author | : Ivo Utke |
| Publisher | : OUP USA |
| Total Pages | : 830 |
| Release | : 2012-05 |
| ISBN-10 | : 9780199734214 |
| ISBN-13 | : 0199734216 |
| Rating | : 4/5 (216 Downloads) |
Book Synopsis Nanofabrication Using Focused Ion and Electron Beams by : Ivo Utke
Download or read book Nanofabrication Using Focused Ion and Electron Beams written by Ivo Utke and published by OUP USA. This book was released on 2012-05 with total page 830 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.
