Plasma Electronics
| Author | : Toshiaki Makabe |
| Publisher | : CRC Press |
| Total Pages | : 406 |
| Release | : 2014-08-27 |
| ISBN-10 | : 9781482222104 |
| ISBN-13 | : 1482222108 |
| Rating | : 4/5 (108 Downloads) |
Book Synopsis Plasma Electronics by : Toshiaki Makabe
Download or read book Plasma Electronics written by Toshiaki Makabe and published by CRC Press. This book was released on 2014-08-27 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental
