Related Books
Language: en
Pages: 362
Pages: 362
Type: BOOK - Published: 1998-05-28 - Publisher: OUP Oxford
The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma ph
Language: en
Pages: 126
Pages: 126
Type: BOOK - Published: 2014-10-25 - Publisher: Springer
This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniat
Language: en
Pages: 247
Pages: 247
Type: BOOK - Published: 2013-06-29 - Publisher: Springer Science & Business Media
This book has been written as part of a series of scientific books being published by Plenum Press. The scope of the series is to review a chosen topic in each
Language: en
Pages: 0
Pages: 0
Type: BOOK - Published: 1989 - Publisher:
Language: en
Pages: 544
Pages: 544
Type: BOOK - Published: 2012-12-02 - Publisher: Elsevier
Plasma Deposition, Treatment, and Etching of Polymers takes a broad look at the basic principles, the chemical processes, and the diagnostic procedures in the i