Resolution Enhancement Techniques in Optical Lithography

Resolution Enhancement Techniques in Optical Lithography
Author :
Publisher : SPIE Press
Total Pages : 238
Release :
ISBN-10 : 0819439959
ISBN-13 : 9780819439956
Rating : 4/5 (956 Downloads)

Book Synopsis Resolution Enhancement Techniques in Optical Lithography by : Alfred Kwok-Kit Wong

Download or read book Resolution Enhancement Techniques in Optical Lithography written by Alfred Kwok-Kit Wong and published by SPIE Press. This book was released on 2001 with total page 238 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses two decades of research. It discusses theoretical and practical aspects of commonly used techniques, including optical imaging and resolution, modified illumination, optical proximity correction, alternating and attenuating phase-shifting masks, selecting RETs, and second-generation RETs. Useful for students and practicing lithographers


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