Scaling Laws for Diamond Chemical Vapor Deposition. 2: Atomic Hydrogen Transport

Download or read book Scaling Laws for Diamond Chemical Vapor Deposition. 2: Atomic Hydrogen Transport written by and published by . This book was released on 1993 with total page 34 pages. Available in PDF, EPUB and Kindle. Book excerpt: Scaling relations are developed to allow estimation of the atomic hydrogen concentration at the substrate during diamond chemical vapor deposition for both diffusion-dominated and convection-dominated reactors. In the convection-dominated case, it is shown that there exists an optimal Mach number which maximizes the H concentration delivered to the substrate. In addition, when homogeneous recombination is taken into account, there exists an optimal operating pressure. This analysis shows that a sonic flow of highly dissociated hydrogen at a pressure near atmospheric is optimal for rapid growth of high-quality diamond.