Selected Papers on Resolution Enhancement Techniques in Optical Lithography
| Author | : F. M. Schellenberg |
| Publisher | : SPIE-International Society for Optical Engineering |
| Total Pages | : 910 |
| Release | : 2004 |
| ISBN-10 | : UCSD:31822032513939 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis Selected Papers on Resolution Enhancement Techniques in Optical Lithography by : F. M. Schellenberg
Download or read book Selected Papers on Resolution Enhancement Techniques in Optical Lithography written by F. M. Schellenberg and published by SPIE-International Society for Optical Engineering. This book was released on 2004 with total page 910 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical lithography for integrated circuits is undergoing a renaissance with the adoption of Resolution Enhancement Technology (RET). Some RET concepts have become routine in manufacturing. This volume gathers together seminal RET papers.
