Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 9
| Author | : Ram Ekwal Sah |
| Publisher | : The Electrochemical Society |
| Total Pages | : 863 |
| Release | : 2007 |
| ISBN-10 | : 9781566775526 |
| ISBN-13 | : 1566775523 |
| Rating | : 4/5 (523 Downloads) |
Book Synopsis Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 9 by : Ram Ekwal Sah
Download or read book Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 9 written by Ram Ekwal Sah and published by The Electrochemical Society. This book was released on 2007 with total page 863 pages. Available in PDF, EPUB and Kindle. Book excerpt: This issue of ECS Transactions contains the papers presented in the symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectics held May 6-11, 2007 in Chicago. Papers were presented on deposition, characterization and applications of the dielectrics including high- and low-k dielectrics, as well as interface states, device characterization, reliabiliy and modeling.
