Structural, Optical, and Mechanical Properties of Silicon Nitride Films Deposited by Inductively Coupled Plasma Enhanced Chemical Vapor Deposition
| Author | : Ezgi Abacıoğlu |
| Publisher | : |
| Total Pages | : 0 |
| Release | : 2022 |
| ISBN-10 | : OCLC:1396201108 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis Structural, Optical, and Mechanical Properties of Silicon Nitride Films Deposited by Inductively Coupled Plasma Enhanced Chemical Vapor Deposition by : Ezgi Abacıoğlu
Download or read book Structural, Optical, and Mechanical Properties of Silicon Nitride Films Deposited by Inductively Coupled Plasma Enhanced Chemical Vapor Deposition written by Ezgi Abacıoğlu and published by . This book was released on 2022 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
