Synthesis and Characterization of Silicon Dioxide Thin Films by Low Pressure Chemical Vapor Deposition Using Ditertiarybutylsilane and Oxygen
| Author | : Sung-Jun Lee |
| Publisher | : |
| Total Pages | : 104 |
| Release | : 1996 |
| ISBN-10 | : OCLC:36668328 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis Synthesis and Characterization of Silicon Dioxide Thin Films by Low Pressure Chemical Vapor Deposition Using Ditertiarybutylsilane and Oxygen by : Sung-Jun Lee
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