Synthesis and Characterization of Silicon Nitride Films Deposited by Plasma Enhanced Chemical Vapor Deposition Using Diethylsilane
| Author | : Yanyao Yu |
| Publisher | : |
| Total Pages | : 116 |
| Release | : 1993 |
| ISBN-10 | : OCLC:29983777 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis Synthesis and Characterization of Silicon Nitride Films Deposited by Plasma Enhanced Chemical Vapor Deposition Using Diethylsilane by : Yanyao Yu
Download or read book Synthesis and Characterization of Silicon Nitride Films Deposited by Plasma Enhanced Chemical Vapor Deposition Using Diethylsilane written by Yanyao Yu and published by . This book was released on 1993 with total page 116 pages. Available in PDF, EPUB and Kindle. Book excerpt:
