ULSI Process Integration 5

ULSI Process Integration 5
Author :
Publisher : The Electrochemical Society
Total Pages : 509
Release :
ISBN-10 : 9781566775724
ISBN-13 : 1566775728
Rating : 4/5 (728 Downloads)

Book Synopsis ULSI Process Integration 5 by : Cor L. Claeys

Download or read book ULSI Process Integration 5 written by Cor L. Claeys and published by The Electrochemical Society. This book was released on 2007 with total page 509 pages. Available in PDF, EPUB and Kindle. Book excerpt: The symposium provided a forum for reviewing and discussing all aspects of process integration, with special focus on nanoscaled technologies, 65 nm and beyond on DRAM, SRAM, flash memory, high density logic-low power, RF, mixed analog-digital, process integration yield, CMP chemistries, low-k processes, gate stacks, metal gates, rapid thermal processing, silicides, copper interconnects, carbon nanotubes, novel materials, high mobility substrates (SOI, sSi, SiGe, GeOI), strain engineering, and hybrid integration.


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