Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
| Author | : P. Rai-Choudhury |
| Publisher | : SPIE Press |
| Total Pages | : 780 |
| Release | : 1997 |
| ISBN-10 | : 0819423785 |
| ISBN-13 | : 9780819423788 |
| Rating | : 4/5 (788 Downloads) |
Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography by : P. Rai-Choudhury
Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography written by P. Rai-Choudhury and published by SPIE Press. This book was released on 1997 with total page 780 pages. Available in PDF, EPUB and Kindle. Book excerpt: The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Copublished with IEE.
